Radio frequency glow discharge optical emission spectroscopy (RF GD-OES)
Radio frequency glow discharge optical emission spectroscopy (RF GD-OES) allows depth profiling of materials ranging from thin films (with a depth of a few nanometers) to bulks (with a depth of tens of micrometers) at high depth resolution and in a high speed. RF GD-OES can evaluate various materials, including metals, insulation films (e.g., glass) and organic films.
|Atoms are sputtered from the sample surface in an argon (Ar) glow discharge. The sputtered atoms recombine with electrons in the plasma discharge. The light emitted from this recombination is analyzed using an optical emission spectrometer in order to obtain a depth profile of chemical composition.
Principle of Operation
45 elements (H - U), including one by monochromator, are measurable simultaneously.
RF GD-OES provides a detection limit slightly inferior to secondary ion mass spectrometry (SIMS). However, it delivers a sensitivity of a few tens of ppm for certain elements such as boron.
High: Approx. 1nm
RF GD-OES takes shorter time than depth profile analysis using an X-ray photoelectron spectrometer (XPS) or an Auger electron spectroscope (AES).
Comparisons between RF GD-OES and Other Surface Analysis Methods
|Detection limit1)||20 ppm
|Up to 1 ppm
|Area analyzed||φ1 mm
|Tens of Êm square or larger||φ10Êm or larger (XPS)
φTens of nm or larger (AES)
|Depth resolution||Approx. 1 nm||A few nm or greater||A few nm or greater|
|Depth profile analysis time2)||Up to 1 min.||20 to 30min.||3 hrs. or longer|
1) The detection limit varies with elements.
2) Approximate time for measurement of a thin-film with a thickness of a few hundred nanometers
@@SIMS: Secondary Ion Mass Spectrometer
@@XPS: X-ray Photoelectron Spectrometer
@@AES: Auger Electron Spectroscope
■ Analysis of a multilayer film
The intensity of the Fe spectrum drops in CoFe (1 nm), MgO (1 nm) and
- Depth profile analysis
•Evaluation of multilayer film diffusion and interfaces (GMR, MRAM, etc.)
•Implanted ion distribution profiling
•Analysis of the composition of battery electrodes (rechargeable batteries, secondary batteries, etc.), glasses, semiconductors, metals, etc.
- Specimen surface treatment while monitoring elements
[Last updated: October 17, 2018]